[1]李爽,王凤翔,付刚,等.射频磁控溅射制备ZnO光波导薄膜[J].山东建筑大学学报,2010,(01):10-13.
 LI Shuang,WANG Feng-xiang,FU Gang,et al.ZnO optical waveguide films prepared by rf magnetron sputtering[J].Journal of Shandong jianzhu university,2010,(01):10-13.
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射频磁控溅射制备ZnO光波导薄膜()
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《山东建筑大学学报》[ISSN:1673-7644/CN:37-1449/TU]

卷:
期数:
2010年01期
页码:
10-13
栏目:
研究论文
出版日期:
2010-02-15

文章信息/Info

Title:
ZnO optical waveguide films prepared by rf magnetron sputtering
作者:
李爽王凤翔付刚季艳菊赵俊卿
山东建筑大学 理学院,山东 济南 250101
Author(s):
LI Shuang WANG Feng-xiang FU Gang et al。
School of Science, Shandong Jianzhu University, Jinan 250101, China
关键词:
ZnO薄膜射频磁控溅射光波导X射线衍射
Keywords:
ZnO thin films r f magnetron sputtering optical waveguide X-ray diffraction
分类号:
O484.4
文献标志码:
A
摘要:
采用射频磁控溅射技术在石英玻璃上制备出了具有高度c轴择优取向的ZnO薄膜。利用X射线衍射(XRD)、背散射分析(RBS)、棱镜耦合等技术对其结构、光波导性质进行研究,结果表明减小溅射压强有利于提高薄膜的结晶质量,增强薄膜的c轴择优取向。溅射压强越小,薄膜越厚,薄膜的有效折射率越接近晶体材料的折射率。
Abstract:
ZnO thin films with a strong c-axis orientation are successfully deposited on quartz glass substrates at room temperature by radio frequency (rf) magnetron sputtering technology. X-ray diffraction, Rutherford backscattering, and prism coupling method were used to investigate the structure and optical properties of ZnO thin films. The results showed that lower sputtering pressure is propitious to increasing the crystallinity, and enhancing the c-axis orientation of the films. As the sputtering pressure decreasing, the thicker of films were increased, the closer effective refractive indices of ZnO films to Crystal Refractive Indices.

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更新日期/Last Update: 2010-03-10